The NS-3500 is a high-speed confocal laser scanning microscope (CLSM) designed for precise and reliable 3D measurement. It features fast optical scanning modules and advanced signal processing algorithms to deliver real-time confocal microscopic imaging. This system excels in measuring and inspecting microscopic 3D structures such as semiconductor wafers, FPD products, MEMS devices, glass substrates, and material surfaces. With its high resolution and versatile capabilities, the NS-3500 is an ideal solution for quality control, research, and production applications across various advanced technology industries.
Features:
- High resolution nondestructive optical 3D measurement
- Real time confocal imaging
- Various optical zoom
- Simultaneous bright field and confocal imaging
- Automatic gain search with fine auto focus
- Inclination compensation
- Easy analysis mode
- Precise and reliable high-speed height measurement
- Inspection of features through semi-transparent substrate
- No sample preparation
- Image stitching for wide range inspection
Applications:
- Semiconductor : IC pattern, bump height, wire loop height, defect inspection, CMP process
- FPD product : Touch panel screen inspection, ITO pattern, LCD column spacer height
- MEMS device : 3D profile of structure, surface roughness, MEMS pattern
- Glass surfaces : Thin film solar cell, solar cell texture, laser pattern
- Material researches : Tooling surface inspection, roughness, crack analysis