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Electron Beam Evaporation

The Syskey Electron Beam Evaporation system is a thin-film deposition technique that utilizes an electron beam to heat and evaporate materials in a vacuum chamber. This process allows for the deposition of a variety of materials, including metals, insulators, and semiconductors, onto substrates, forming thin, high-quality films.

 

List of Electron Beam Evaporation:

  • E-Beam Evaporation System
  • UHV E-Beam
  • Lift-Off

 

Features:

  • Electron Beam Technology: Uses focused electron beams to heat the target material, causing it to vaporize and deposit onto the substrate.
  • High Precision: Provides precise control over the deposition rate and allows for the deposition of complex materials with excellent uniformity.
  • High Deposition Efficiency: The electron beam can achieve very high temperatures, enabling fast deposition of materials with minimal waste.
  • Wide Material Compatibility: Suitable for a wide range of materials, including metals, ceramics, and high-melting-point substances that are difficult to evaporate by other methods.
  • Vacuum Environment: Operates in a vacuum, reducing contamination and ensuring high film quality and purity.

 

Applications:

  • Optoelectronic material (LED/Laser Diode).
  • Communication device.
  • Semiconductor device