Jandel Engineering Limited manufactures probes that are compatible with systems from KLA/Tencor/Prometrix, such as the RS55, RS75, RS100, and other similar models. These systems are widely used in semiconductor and materials research for resistivity and sheet resistance measurements.
Features:
- 6-way connector probe head designed for compatibility with KLA/Tencor/Prometrix systems.
- Similar probes are available for CDE tools, but CDE probes are not interchangeable with those for KLA/Tencor/Prometrix systems.
- Distinctive black nosepiece on CDE-compatible probes to differentiate them from KLA/Tencor/Prometrix versions.
- High mechanical accuracy with verified specifications for radii, spacing, and planarity using video inspection systems and optical interferometers.
- Load verification is conducted using an electronic force gauge.
- Upper and lower jeweled needle guides ensure stable contact.
Applications:
- Resistivity and sheet resistance measurements in semiconductor research.
- Thin-film measurement for quality control in the electronics and solar industries.
- Suitable for use in semiconductor fabrication and advanced material research.
- Research labs and industrial testing environments for high-precision electrical measurements