Photolithography is a microfabrication process used to create detailed patterns on substrates, essential in semiconductor manufacturing and electronics. It involves applying a photosensitive material (photoresist) to a substrate, exposing it to UV light through a patterned mask, developing the exposed areas, etching the substrate to transfer the pattern, and then removing the photoresist. This process enables the creation of fine, intricate structures, critical for producing advanced electronics and miniaturized devices.
Instrument list for photolithography:
- Spin coater
- Mask aligner
- Maskless lithography UV Direct Laser Writer
- UV Exposure
- Hotplates
- UV Meters
- Photoresist
- Reticle Box
- Plastic Boxes for Storage of Masks and Reticles